US 9,809,877 B2
Ion implantation apparatus with ion beam directing unit
Alexander Breymesser, Villach (AT); Stephan Voss, Munich (DE); Hans-Joachim Schulze, Taufkirchen (DE); and Werner Schustereder, Villach (AT)
Assigned to Infineon Technologies AG, Neubiberg (DE)
Filed by Infineon Technologies AG, Neubiberg (DE)
Filed on Jun. 22, 2016, as Appl. No. 15/189,209.
Application 15/189,209 is a division of application No. 14/177,910, filed on Feb. 11, 2014, granted, now 9,390,883.
Prior Publication US 2016/0305012 A1, Oct. 20, 2016
Int. Cl. C23C 14/48 (2006.01); H01J 37/147 (2006.01); H01J 37/20 (2006.01); H01J 37/317 (2006.01); H01L 29/06 (2006.01); H01L 29/744 (2006.01); H01L 29/36 (2006.01); H01L 29/861 (2006.01); H01L 21/265 (2006.01); H01L 21/687 (2006.01); H01L 29/45 (2006.01)
CPC C23C 14/48 (2013.01) [H01J 37/1477 (2013.01); H01J 37/20 (2013.01); H01J 37/3171 (2013.01); H01L 21/265 (2013.01); H01L 21/68764 (2013.01); H01L 29/0615 (2013.01); H01L 29/0623 (2013.01); H01L 29/0638 (2013.01); H01L 29/0657 (2013.01); H01L 29/36 (2013.01); H01L 29/744 (2013.01); H01L 29/861 (2013.01); H01J 2237/20214 (2013.01); H01L 29/45 (2013.01)] 5 Claims
OG exemplary drawing
 
1. An ion implantation apparatus, comprising:
an ion beam directing unit;
a substrate support;
a controller configured to effect a relative movement between an ion beam passing the ion beam directing unit and the substrate support, wherein a beam track of the ion beam on a substrate mounted on the substrate support includes circles or a spiral in a plane; and
a controllable motor drive unit configured to rotate the substrate support in a plane slanted by at most 10 degree with respect to a plane perpendicular to the ion beam.