US 9,809,871 B1
Silver nanoparticle method on zinc oxide films
Qasem Ahmed Drmosh, Dhahran (SA); Mohammad Kamal Hossain, Dhahran (SA); and Nouar Amor Tabet, Doha (QA)
Assigned to King Fahd University of Petroleum and Minerals, Dhahran (SA)
Filed by KING FAHD UNIVERSITY OF PETROLEUM AND MINERALS, Dhahran (SA)
Filed on Jul. 24, 2017, as Appl. No. 15/658,068.
Application 15/658,068 is a continuation of application No. 14/632,316, filed on Feb. 26, 2015, granted, now 9,745,645.
This patent is subject to a terminal disclaimer.
Int. Cl. C23C 14/18 (2006.01); C22C 5/06 (2006.01); C22F 1/14 (2006.01); B22F 1/00 (2006.01); C23C 14/58 (2006.01); C23C 14/08 (2006.01)
CPC C22C 5/06 (2013.01) [B22F 1/0018 (2013.01); C22F 1/14 (2013.01); C23C 14/086 (2013.01); C23C 14/185 (2013.01); C23C 14/5806 (2013.01); B22F 1/0014 (2013.01); B22F 2001/0037 (2013.01)] 5 Claims
OG exemplary drawing
 
1. An O2 reactive plasma/Ag sputtering method on zinc metal to form silver nanoparticles, comprising:
forming a zinc oxide film by plasma reacting oxygen with a zinc metal target,
sputtering silver onto the zinc oxide film to form a silver film on the zinc oxide film; and
annealing the silver film to form the silver nanoparticles from the silver film;
wherein the annealing is carried out at a temperature of 400-700° C. for a duration of 3-24 hours under an atmosphere of argon, nitrogen or air.