US 9,809,711 B2
Catalyst and formulations comprising same for alkoxysilanes hydrolysis reaction in semiconductor process
Manchao Xiao, San Diego, CA (US); Ronald Martin Pearlstein, San Marcos, CA (US); Richard Ho, Anaheim, CA (US); Xinjian Lei, Vista, CA (US); Steven Gerard Mayorga, Oceanside, CA (US); and Daniel P. Spence, Carlsbad, CA (US)
Assigned to VERSUM MATERIALS US, LLC, Allentown, PA (US)
Filed by Air Products and Chemicals, Inc., Allentown, PA (US)
Filed on Jan. 10, 2013, as Appl. No. 13/738,482.
Claims priority of provisional application 61/587,388, filed on Jan. 17, 2012.
Claims priority of provisional application 61/706,809, filed on Sep. 28, 2012.
Prior Publication US 2013/0180215 A1, Jul. 18, 2013
Int. Cl. C09D 1/00 (2006.01); H01L 21/02 (2006.01); B65B 1/04 (2006.01); C08G 77/04 (2006.01)
CPC C09D 1/00 (2013.01) [B65B 1/04 (2013.01); C08G 77/04 (2013.01); H01L 21/02126 (2013.01); H01L 21/02216 (2013.01); H01L 21/02282 (2013.01)] 26 Claims
 
1. A formulation comprising
(a) a silicon-containing precursor comprising a compound having a formula R23-p(R1O)pSi—R3—Si(OR1)pR23-p and
(b) a catalyst comprising a haloalkoxyalkylsilane having a formula of (R1O)mR22-m(X)Si—R3—Si(OR4)2R5; wherein R1 and R4 are each independently selected from a C1-C12 linear or branched alkyl group; a C3-C12 aryl group; a C3-C12 cycloalkyl group; a C2-C12 alkenyl group; and a C2-C12 alkynyl group; R2 is selected from a C1-C12 linear or branched alkyl group; a C3-C12 aryl group; a C3-C12 cycloalkyl group; a C2-C12 alkenyl group; a C2-C12 alkynyl group; and a hydrogen atom; wherein R1 and R2 may be the same or different; R3 is selected from a C1-10 alkanediyl group; a C2-10 alkenediyl group; a C2-10 alkynediyl group; a C3-10 cyclic alkanediyl; a C5-10 cyclic alkenediyl group; a C6-10 bi-cyclic alkanediyl group; a C6-10 cyclic alkenediyl group; a C6-10 arenediyl group; and R5 is selected from a linear or branched C1-C12 alkyl group; a C4-C12 aryl group; a C3-C12 cycloalkyl group; a C2-C12 alkenyl group; a C2-C12 alkynyl group; and a linear or branched C1-C12 alkoxy group; X is chosen from F, Cl, Br and I; m is an integer ranging from 1 to 2 inclusive; and p is an integer ranging from 1 to 3 inclusive; and wherein R1 in the silicon containing precursor and R1 in the catalyst are the same substituents and the concentration of the silicon-containing precursor and the catalyst does not change by more than 10 wt %, based upon gas chromatography, after storage for a period of one year.