US 9,809,672 B2
Aromatic resins for underlayers
Li Cui, Westborough, MA (US); Sung Wook Cho, Gyeonggi-do (KR); Mingqi Li, Shrewsbury, MA (US); Shintaro Yamada, Shrewsbury, MA (US); Peter Trefonas, III, Medway, MA (US); and Robert L. Auger, Midland, MI (US)
Assigned to Rohm and Haas Electronic Materials LLC, Marlborough, MA (US); and Rohm and Haas Electronic Materials Korea Ltd, Cheonan (KR)
Filed by Rohm and Haas Electronic Materials LLC, Marlborough, MA (US); and Rohm and Haas Electronic Materials Korea Ltd., Chungcheongnam-do (KR)
Filed on Nov. 29, 2016, as Appl. No. 15/363,114.
Application 15/363,114 is a continuation of application No. 14/569,610, filed on Dec. 12, 2014, granted, now 9,540,476.
Claims priority of provisional application 61/915,475, filed on Dec. 12, 2013.
Prior Publication US 2017/0073453 A1, Mar. 16, 2017
This patent is subject to a terminal disclaimer.
Int. Cl. G03F 7/09 (2006.01); C08G 8/08 (2006.01); C09D 161/06 (2006.01); C08G 8/04 (2006.01); H01L 21/311 (2006.01); G03F 7/16 (2006.01); G03F 7/20 (2006.01); G03F 7/26 (2006.01)
CPC C08G 8/04 (2013.01) [C08G 8/08 (2013.01); C09D 161/06 (2013.01); G03F 7/091 (2013.01); G03F 7/094 (2013.01); G03F 7/16 (2013.01); G03F 7/168 (2013.01); G03F 7/2002 (2013.01); G03F 7/26 (2013.01); H01L 21/31111 (2013.01); H01L 21/31144 (2013.01)] 13 Claims
 
1. A reaction product formed from a combination comprising one or more first monomers of the formula

OG Complex Work Unit Drawing
wherein Y is selected from H, C1-C30alkyl, C2-C30alkenyl, C7-C30aralkyl, C6-C30aryl, substituted C6-C30aryl, —C1-C30alkylene-OR1, and —C1-C30alkylidene-OR1; each R is independently selected from C1-C30alkyl, C2-C30alkenyl, C7-C30aralkyl, C6-C30aryl, substituted C6-C30aryl, —OR1, —C1-C30alkylene-OR1, and —C1-C30alkylidene-OR1; R1 is selected from H, C1-C30alkyl, C6-C30aryl, substituted C6-C30aryl, and C7-C30aralkyl; and n is an integer selected from 0 to 7; and one or more second monomers of formula (IIa) or (IIb)

OG Complex Work Unit Drawing
wherein A represents 1 to 4 fused aromatic rings; A1 represents 1 to 3 fused aromatic rings; each of A2 and A3 may be present or absent and each of A2 and A3 represents 1 to 2 fused aromatic rings; each R2 is independently selected from C1-C30alkyl, C2-C30alkenyl, C7-C30aralkyl, C6-C30aryl, substituted C6-C30aryl, —OR3, —C1-C30alkylene-OR3; each R3 is selected from H, C1-C30alkyl, and C6-C30aryl; and m is an integer from 0 to 13; wherein A1, A2 and A3 represent a total of 3 fused aromatic rings.