US 9,809,445 B2
Electromechanical system structures with ribs having gaps
Mark B. Andersson, Northborough, MA (US); Joyce H. Wu, Somerville, MA (US); and Jasper Lodewyk Steyn, Winchester, MA (US)
Assigned to QUALCOMM Incorporated, San Diego, CA (US)
Filed by Mark B. Andersson, Northborough, MA (US); Joyce H. Wu, Somerville, MA (US); and Jasper Lodewyk Steyn, Winchester, MA (US)
Filed on Aug. 22, 2012, as Appl. No. 13/591,842.
Claims priority of provisional application 61/527,843, filed on Aug. 26, 2011.
Prior Publication US 2013/0050290 A1, Feb. 28, 2013
Int. Cl. B81B 3/00 (2006.01); G02B 26/02 (2006.01); G09G 3/34 (2006.01)
CPC B81B 3/007 (2013.01) [G02B 26/023 (2013.01); B81B 2201/047 (2013.01); B81B 2203/0109 (2013.01); B81B 2203/0163 (2013.01); B81B 2203/0307 (2013.01); B81B 2203/051 (2013.01); G09G 3/346 (2013.01); G09G 3/3473 (2013.01); G09G 2300/08 (2013.01)] 15 Claims
OG exemplary drawing
 
1. An electromechanical system (EMS) assembly, comprising:
a substrate;
an anchor disposed on the substrate; and
a suspended planar body supported over the substrate by the anchor, wherein the suspended planar body defines a first aperture and a second aperture and includes:
at least one depression extending out of a plane of the suspended planar body, and
a substantially horizontal portion corresponding to a gap in the at least one depression, wherein the substantially horizontal portion extends in a same plane as the plane of the suspended planar body from a first edge of the suspended planar body to an opposing second edge of the suspended planar body, the first edge forms at least a portion of a perimeter of the first aperture, and the second edge forms at least a portion of a perimeter of the second aperture.