US 9,809,444 B2
System and method for a differential comb drive MEMS
Wolfgang Klein, Zorneding (DE)
Assigned to Infineon Technologies AG, Neubiberg (DE)
Filed by Infineon Technologies AG, Neubiberg (DE)
Filed on Feb. 27, 2017, as Appl. No. 15/443,922.
Application 15/443,922 is a continuation of application No. 14/928,702, filed on Oct. 30, 2015, granted, now 9,611,135.
Prior Publication US 2017/0166437 A1, Jun. 15, 2017
Int. Cl. H04R 19/04 (2006.01); B81B 3/00 (2006.01); B81C 1/00 (2006.01); H02N 2/02 (2006.01); H04R 19/00 (2006.01)
CPC B81B 3/0021 (2013.01) [B81C 1/00158 (2013.01); H02N 2/02 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/0136 (2013.01); B81B 2203/0307 (2013.01); B81C 2201/0197 (2013.01); H04R 19/005 (2013.01); H04R 2201/003 (2013.01)] 20 Claims
OG exemplary drawing
1. A microelectromechanical systems (MEMS) device comprising:
a deflectable membrane comprising a first overlapping portion, the first overlapping portion comprising a first surface;
a first anchor structure comprising:
a first anchor portion fixed to a substrate,
a first extension portion extending away from the first anchor portion, the first extension portion comprising a first material, wherein the first extension portion bends in a first direction, and
a second overlapping portion comprising a second surface overlapping the first surface; and
a second anchor structure comprising:
a second anchor portion fixed to the substrate,
a second extension portion extending away from the second anchor portion, the second extension portion comprising a second material, wherein the second extension portion bends in a second direction, the second direction opposite the first direction, and
a third overlapping portion comprising a third surface, wherein the first overlapping portion further comprises a fourth surface, and wherein the third surface overlaps the fourth surface.