US 9,809,019 B2
Methods to dismantle hermetically sealed chambers
Raymond Miller Karam, Santa Barbara, CA (US); Thomas Wynne, Santa Barbara, CA (US); and Anthony Thomas Chobot, Goleta, CA (US)
Filed by Raymond Miller Karam, Santa Barbara, CA (US); Thomas Wynne, Santa Barbara, CA (US); and Anthony Thomas Chobot, Goleta, CA (US)
Filed on Aug. 16, 2016, as Appl. No. 15/237,953.
Application 15/237,953 is a division of application No. 14/270,265, filed on May 5, 2014, granted, now 9,440,424.
Prior Publication US 2016/0368258 A1, Dec. 22, 2016
Int. Cl. H01L 23/04 (2006.01); B32B 43/00 (2006.01); B32B 38/00 (2006.01); B01L 3/00 (2006.01)
CPC B32B 43/006 (2013.01) [B01L 3/50273 (2013.01); B32B 38/0008 (2013.01); B32B 38/0036 (2013.01); B32B 43/00 (2013.01); B01L 2200/0689 (2013.01); B01L 2300/0816 (2013.01); B01L 2300/0887 (2013.01); B01L 2400/0481 (2013.01); B32B 2310/00 (2013.01); B32B 2439/80 (2013.01); B32B 2535/00 (2013.01); Y10T 156/1195 (2015.01); Y10T 156/1972 (2015.01)] 12 Claims
OG exemplary drawing
 
1. An apparatus facilitating the opening of a hermetically sealed chamber, the apparatus comprising:
a fixture configured to hold a device comprising first and second planar substrates, wherein the hermetic seal of the chamber lies in a plane parallel to and positioned between directly opposed surfaces of the first and second planar substrates; and
a system configured to create sufficient tensile or shear stress at a bond interface of the hermetic seal of the chamber to open the hermetic seal under controlled conditions.