US 9,808,937 B2
Film suction mechanism
Kayo Kumakura, Tochigi (JP); Satoru Idojiri, Tochigi (JP); Masakatsu Ohno, Tochigi (JP); Koichi Takeshima, Tochigi (JP); Yoshiharu Hirakata, Kanagawa (JP); and Kohei Yokoyama, Kanagawa (JP)
Assigned to Semiconductor Energy Laboratory Co., Ltd., Kanagawa-ken (JP)
Filed by Semiconductor Energy Laboratory Co., LTD., Atsugi-shi, Kanagawa-ken (JP)
Filed on Apr. 29, 2015, as Appl. No. 14/699,614.
Claims priority of application No. 2014-095581 (JP), filed on May 3, 2014.
Prior Publication US 2015/0314456 A1, Nov. 5, 2015
Int. Cl. B25J 15/06 (2006.01); B25J 11/00 (2006.01); B25J 15/00 (2006.01)
CPC B25J 15/0616 (2013.01) [B25J 11/00 (2013.01); B25J 15/0004 (2013.01); B25J 15/0028 (2013.01); B25J 15/0061 (2013.01)] 16 Claims
OG exemplary drawing
 
1. An apparatus comprising:
a film suction mechanism for holding a flexible film having a first surface and a second surface, comprising:
a suction unit comprising a plurality of first suction pads;
an air nozzle configured to blow air onto the flexible film; and
a plurality of robot hands each comprising a second suction pad and a swing drive mechanism,
wherein the suction unit is configured to attach the second surface to the plurality of first suction pads by suction while the air is blown onto the first surface,
wherein in the suction unit, the flexible film is held with a part of the plurality of first suction pads located in or near the middle of the suction unit, and then the flexible film is held with all of the plurality of first suction pads by blowing air onto the first surface,
wherein the second suction pads of the plurality of robot hands are located between outermost two of the plurality of first suction pads, and
wherein the swing drive mechanism included in each of the plurality of robot hands is configured to swing the corresponding robot hand on an axis parallel to the flexible film, so that one of the plurality of first suction pads located outside the second suction pad is capable of attaching the flexible film.