US 9,808,906 B2
Polishing system with front side pressure control
Shou-Sung Chang, Mountain View, CA (US); Takashi Fujikawa, San Jose, CA (US); Hung Chih Chen, Sunnyvale, CA (US); and Paul D. Butterfield, San Jose, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jun. 3, 2016, as Appl. No. 15/173,491.
Application 15/173,491 is a continuation of application No. 14/213,842, filed on Mar. 14, 2014, granted, now 9,358,658.
Claims priority of provisional application 61/801,163, filed on Mar. 15, 2013.
Prior Publication US 2016/0279756 A1, Sep. 29, 2016
Int. Cl. B24B 37/005 (2012.01); B24B 37/04 (2012.01); B24B 37/10 (2012.01); B24B 49/16 (2006.01); B24B 37/32 (2012.01); B24B 37/16 (2012.01)
CPC B24B 37/005 (2013.01) [B24B 37/042 (2013.01); B24B 37/10 (2013.01); B24B 37/16 (2013.01); B24B 37/32 (2013.01); B24B 49/16 (2013.01)] 9 Claims
OG exemplary drawing
1. A polishing apparatus, comprising:
a platen having a first surface to support a polishing pad, a second surface on a side of the platen opposite the first surface, and a plurality of holes extending through the platen from the first surface to the second surface, the plurality of holes arranged in a regular first pattern;
a carrier head to hold a substrate against the polishing pad; and
a pad pressure control assembly adjacent a side of the platen opposite the carrier head, wherein the pressure control assembly comprises a body having a third surface substantially parallel to the second surface of the platen and a plurality of conduits formed therein, wherein each conduit is configured to have an output end of the conduit on the third surface to provide a plurality of output ends, wherein the pad pressure control assembly is configured to direct fluid from the conduits to apply pressure through at least some of the plurality of holes to an underside of the polishing pad, wherein the plurality of conduits of the pressure control assembly are grouped into a plurality of independently controllable annular zones arranged in a second pattern that is different from the first pattern, wherein fluid flow through the conduits in each annular zone of the plurality of independently controllably annular zones is commonly controlled, and wherein the second surface of the platen is separated from the third surface of the body of the pad pressure control assembly by a gap that spans across the plurality output ends of the plurality of conduits in the body.