US 9,808,884 B2
Polycrystalline SiC wafer producing method
Kazuya Hirata, Tokyo (JP); and Yoko Nishino, Tokyo (JP)
Assigned to Disco Corporation, Tokyo (JP)
Filed by DISCO CORPORATION, Tokyo (JP)
Filed on Jul. 7, 2016, as Appl. No. 15/204,576.
Claims priority of application No. 2015-139679 (JP), filed on Jul. 13, 2015.
Prior Publication US 2017/0014944 A1, Jan. 19, 2017
Int. Cl. H01L 21/02 (2006.01); B23K 26/00 (2014.01); B23K 26/0622 (2014.01); B28D 5/00 (2006.01); B23K 26/53 (2014.01); B23K 103/00 (2006.01)
CPC B23K 26/0057 (2013.01) [B23K 26/0006 (2013.01); B23K 26/0622 (2015.10); B23K 26/53 (2015.10); B28D 5/0011 (2013.01); B23K 2203/56 (2015.10)] 4 Claims
OG exemplary drawing
 
1. A polycrystalline SiC wafer producing method for producing a polycrystalline SiC wafer from a polycrystalline SiC ingot, the method comprising:
a modified layer forming step of positioning a light focus point of a pulse laser beam having such a wavelength as to be transmitted through the polycrystalline SiC ingot at a predetermined position from an irradiated surface of the polycrystalline SiC ingot and irradiating the polycrystalline SiC ingot with the pulse laser beam to form modified layers at a position at which an interface between the polycrystalline SiC wafer and the polycrystalline SiC ingot is to be formed; and
a polycrystalline SiC wafer separating step of giving an external force to an upper side relative to the interface formed by the modified layer forming step and separating the polycrystalline SiC wafer from the interface,
wherein the interface formed in the modified layer forming step is a surface formed by linking of modified layers formed in such a manner that an initial modified layer is formed through splitting of polycrystalline SiC into amorphous silicon and amorphous carbon at the light focus point of the pulse laser beam, the pulse laser beam emitted next is absorbed by the amorphous carbon formed by the pulse laser beam emitted in advance and polycrystalline SiC splits into amorphous silicon and amorphous carbon on an irradiated surface side relative to the light focus point, and polycrystalline SiC splits into amorphous silicon and amorphous carbon at a position at which power density is constant with absorption of the continuously-emitted pulse laser beam by amorphous carbon formed continuously in advance.