US 9,808,760 B2
Active filtration system for controlling cleanroom environments
Gerald Gromala, Boulder, CO (US); Ronald W. Adkins, Boulder, CO (US); Gilberto Dalmaso, Fonte Nuova (IT); Brian A. Knollenberg, Boulder, CO (US); and Daniel Rodier, Boulder, CO (US)
Assigned to PARTICLE MEASURING SYSTEMS, INC., Boulder, CO (US); and PARTICLE MEASURING SYSTEMS, S.R.L., Rome (IT)
Filed by PARTICLE MEASURING SYSTEMS, INC., Boulder, CO (US); and PARTICLE MEASURING SYSTEMS, S.R.L., Fonte Nuova, (Rome) (IT)
Filed on Jun. 6, 2017, as Appl. No. 15/615,590.
Application 15/615,590 is a division of application No. 14/793,500, filed on Jul. 7, 2015, granted, now 9,682,345.
Claims priority of provisional application 62/107,979, filed on Jan. 26, 2015.
Claims priority of provisional application 62/021,842, filed on Jul. 8, 2014.
Prior Publication US 2017/0266614 A1, Sep. 21, 2017
Int. Cl. A61L 2/00 (2006.01); B01D 53/82 (2006.01); A61L 9/12 (2006.01); B01D 53/72 (2006.01); B01D 53/32 (2006.01); A61L 9/00 (2006.01); B01D 53/46 (2006.01); B01D 53/44 (2006.01)
CPC B01D 53/82 (2013.01) [A61L 2/00 (2013.01); A61L 9/00 (2013.01); A61L 9/12 (2013.01); B01D 53/323 (2013.01); B01D 53/44 (2013.01); B01D 53/46 (2013.01); B01D 53/72 (2013.01); B01D 2251/104 (2013.01); B01D 2257/708 (2013.01); B01D 2257/91 (2013.01); B01D 2258/06 (2013.01); B01D 2259/4508 (2013.01)] 17 Claims
 
1. A system for controlling conditions in a cleanroom enclosure comprising: an active filtration system in fluid communication with said cleanroom enclosure for reducing a concentration of one or more molecular contaminants or process gases in said cleanroom enclosure, wherein said active filtration system receives gas from said cleanroom enclosure or provides gas to said cleanroom enclosure, decomposes said one or more molecular contaminants or process gases to reaction products and reduces the abundance of particles present in said enclosure.