Subclass Subgroup Patent
C23C 14/34 09809876
  14/35 RE046599
  14/48 09809877
  14/56 09809878
  16/45525 09809879
  16/45546 09809880
  16/513 09809881
  18/1608 09809882
  18/40 09809883
  22/07 09809884
  30/00 09809885
C23F 1/00 09809886
  4/00 09809887
  13/16 09809888