US 7,470,968 B2
T-coil apparatus and method for compensating capacitance
Douglas W. Babcock, Manchester, N.H. (US); Robert A. Duris, Hubbardston, Mass. (US); and Bruce Hecht, Brookline, Mass. (US)
Assigned to Analog Devices, Inc., Norwood, Mass. (US)
Filed on Jan. 04, 2006, as Appl. No. 11/325,882.
Application 11/325882 is a division of application No. 10/722970, filed on Nov. 25, 2003, granted, now 7,248,035.
Claims priority of provisional application 60/433248, filed on Dec. 12, 2002.
Prior Publication US 2006/0109023 A1, May 25, 2006
Int. Cl. H01L 27/08 (2006.01)
U.S. Cl. 257—531  [257/E21.575; 257/566; 257/578; 257/728; 324/158.1; 324/763; 324/765] 18 Claims
OG exemplary drawing
 
1. A capacitance-compensated integrated circuit package to facilitate test of a device under test (DUT), comprising:
a substrate,
a semiconductor circuit layer configured over said substrate to form a signal driver and at least one comparator wherein said driver and said comparator have an associated capacitance,
a dielectric layer over said semiconductor circuit layer
a conductive T-coil circuit arranged over said dielectric layer to form interleaved first and second inductors that join at a common node and respectively extend from said common node to terminate in respective first and second ends, and
electrically conductive vias extending through said dielectric layer to connect said signal driver to said first end and connect said comparator to said common node;
said second end thus provided to receive said DUT wherein said driver provides signals to said first end and said comparator compares responses at said common node to a threshold and said T-coil circuit at least partially compensates said capacitance.