| US 7,470,954 B2 | ||
| Fabrication method for arranging ultra-fine particles | ||
| Seung-Heon Lee, Daejeon (Korea, Republic of); Frédéric S. Diana, Santa Clara, Calif. (US); Antonio Badolato, Santa Barbara, Calif. (US); Pierre M. Petroff, Santa Barbara, Calif. (US); and Edward J. Kramer, Santa Barbara, Calif. (US) | ||
| Assigned to The Regents of the University of California, Oakland, Calif. (US) | ||
| Filed on Nov. 14, 2005, as Appl. No. 11/274,916. | ||
| Application 11/274916 is a division of application No. 10/759589, filed on Jan. 15, 2004, granted, now 6,989,324. | ||
| Prior Publication US 2006/0154466 A1, Jul. 13, 2006 | ||
| Int. Cl. H01L 29/94 (2006.01); H01L 31/062 (2006.01) | ||
| U.S. Cl. 257—331 | 14 Claims |
| 1. A fabricated device comprising:
a photoresist coated-substrate formed with wells through its surface, said wells having gradually sloping walls and an aspect
ratio of less than 0.37, and micelles enclosing nanoparticles disposed in said wells.
|