US 7,469,092 B2
Method and apparatus for the monitoring and control of a process
Andrew D. Sappey, Lakewood, Colo. (US); James Howell, Louisville, Colo. (US); Henrik Hofvander, Boulder, Colo. (US); and Bernard Patrick Masterson, Boulder, Colo. (US)
Assigned to Zolo Technologies, Inc., Boulder, Colo. (US)
Filed on Jul. 24, 2007, as Appl. No. 11/782,492.
Application 11/782492 is a continuation of application No. 10/543288, granted, now 7,248,755, previously published as PCT/US2004/10048, filed on Mar. 31, 2004.
Claims priority of provisional application 60/459108, filed on Mar. 31, 2003.
Prior Publication US 2008/0013887 A1, Jan. 17, 2008
Int. Cl. G02B 6/00 (2006.01)
U.S. Cl. 385—147  [385/52] 13 Claims
OG exemplary drawing
 
1. A diode laser spectroscopy gas sensing apparatus comprising:
a diode laser having a select lasing frequency;
a pitch optic optically coupled to the diode laser, the pitch optic being operatively associated with a process chamber and oriented to project laser light along a projection beam through the process chamber;
a catch optic in optical communication with the pitch optic to receive the laser light projected through the process chamber;
an optical fiber optically coupled to the catch optic;
a catch side alignment mechanism operatively associated with the catch optic providing for the variable alignment of the catch optic with respect to the projection beam to maximize a quantity of laser light received by the catch optic from the pitch optic and coupled to the optical fiber; and
a detector sensitive to the select lasing frequency optically coupled to the optical fiber.