| US 7,468,828 B2 | ||
| Spot array generation using a MEMS light modulator | ||
| Dennis S. Greywall, White House Station, N.J. (US); and Dan M. Marom, Mevaseret Zion, Ill. (US) | ||
| Assigned to Alcatel-Lucent USA Inc., Murray Hill, N.J. (US) | ||
| Filed on Oct. 19, 2006, as Appl. No. 11/550,867. | ||
| Prior Publication US 2008/0094682 A1, Apr. 24, 2008 | ||
| Int. Cl. G02F 1/01 (2006.01); G02B 27/00 (2006.01) | ||
| U.S. Cl. 359—276 [359/279; 359/578] | 18 Claims |
| 1. Apparatus, comprising a device having one or more elemental device units, wherein each unit comprises:
first and second films movably coupled to a base, said first and second films being arranged to define a tunable cavity, wherein:
the first film is adapted to be moved with respect to the base; and
the second film is adapted to be moved with respect to the base and with respect to the first film, wherein the device is
a spatial light modulator (SLM), wherein, for each unit, the tunable cavity is adapted to receive an optical input beam and
form a reflected beam having an amplitude and a phase, wherein each unit is adapted to: (i) change the amplitude by changing
separation between the first and second films and (ii) change the phase by changing position of the cavity with respect to
the base.
|