| US 7,468,825 B2 | ||
| Spatial optical modulator with passivation layer | ||
| Je-Hong Kyoung, Seongnam-si (Korea, Republic of); Jae-Wook Jang, Seongnam-si (Korea, Republic of); Jong-Hyeong Song, Suwon-si (Korea, Republic of); Yun-Jin Ko, Seoul (Korea, Republic of); and Seung-Do An, Suwon-si (Korea, Republic of) | ||
| Assigned to Samsung Electro-Mechanics Co., Ltd., Suwon-si (Korea, Republic of) | ||
| Filed on Oct. 31, 2006, as Appl. No. 11/591,226. | ||
| Claims priority of application No. 10-2005-0104018 (KR), filed on Nov. 01, 2005; application No. 10-2005-0123395 (KR), filed on Dec. 14, 2005; application No. 10-2006-0097428 (KR), filed on Oct. 02, 2006; and application No. 10-2006-0097435 (KR), filed on Oct. 02, 2006. | ||
| Prior Publication US 2007/0097488 A1, May 03, 2007 | ||
| Int. Cl. G02B 26/08 (2006.01) | ||
| U.S. Cl. 359—224 [359/291; 359/847] | 11 Claims |
| 1. An optical modulator comprising:
a substrate;
an insulation layer disposed on the substrate;
a ribbon layer, an intermediate portion of which is spaced apart from the insulation layer by a predetermined gap;
a piezoelectric element that is disposed on the ribbon layer and allows the intermediate portion of the ribbon layer to bend
toward and away from the substrate; and
a passivation layer that is disposed on the piezoelectric element and comprises a main passivation film; and
a sacrificial layer that is disposed between the insulation layer and the ribbon layer and supports the ribbon layer, wherein
a portion of the sacrificial layer below the intermediate portion of the ribbon layer is removed to provide a predetermined
gap between the ribbon layer and the insulation layer.
|