| US 7,468,792 B2 | ||
| Evaluation apparatus and evaluation method | ||
| Yuichi Masaki, Kawasaki (Japan); and Yutaka Akino, Isehara (Japan) | ||
| Assigned to Canon Kabushiki Kaisha, Tokyo (Japan) | ||
| Filed on Dec. 19, 2007, as Appl. No. 11/959,810. | ||
| Application 11/959810 is a continuation of application No. 11/083976, filed on Mar. 21, 2005, granted, now 7,333,196. | ||
| Claims priority of application No. 2004-082930 (JP), filed on Mar. 22, 2004. | ||
| Prior Publication US 2008/0100838 A1, May 01, 2008 | ||
| Int. Cl. G01J 4/00 (2006.01); G01B 9/02 (2006.01) | ||
| U.S. Cl. 356—326 [356/456] | 10 Claims |
| 1. An evaluation apparatus which evaluates a sample, the apparatus comprising:
a light source which irradiates the sample with light;
an imaging spectrometer which spectroscopically measures light reflected by the sample and senses an image;
a first calculator which obtains amplitude information on an amplitude of a spectral reflectance of the sample based on the
image sensed by the imaging spectrometer within a predetermined wavelength range of spectral reflectance spectra obtained
by the spectrometer;
a memory which holds in advance relationship information representing a relationship between the amplitude information of
the spectral reflectance and an absorption coefficient; and
a second calculator which obtains an absorption coefficient of the sample based on the amplitude information obtained by the
first calculator and the relationship information held in the memory;
wherein the relationship information includes information representing a relationship between amplitude information of a spectral
reflectance of a sample having a porous layer and an absorption coefficient of the porous layer.
|