US 7,468,790 B2
Detecting gaseous species by light-emission spectrometry with spectrum processing
Gloria Sogan, Epagny (France); Julien Bounouar, Annecy-le-Vieux (France); Jean-Pierre Desbiolles, Cruseilles (France); and Isabelle Gaurand, Annecy le Vieux (France)
Assigned to Alcatel, Paris (France)
Filed on Feb. 24, 2005, as Appl. No. 11/64,483.
Claims priority of application No. 04 50354 (FR), filed on Feb. 26, 2004.
Prior Publication US 2005/0190363 A1, Sep. 01, 2005
Int. Cl. C23C 16/00 (2006.01); G01J 3/30 (2006.01)
U.S. Cl. 356—301  [438/9] 13 Claims
OG exemplary drawing
 
1. A method of detecting gaseous species in a mixture by light-emission spectroscopy, in which use is made of the radiation emitted by a plasma present in the gas mixture under analysis, a measurement system is used to take a raw optical spectrum of said radiation emitted by the plasma, and the raw optical spectrum is compared with a library of reference optical spectra, the method comprising:
generating a pruned optical spectrum, including making use, in the raw optical spectrum, of only those zones of the spectrum that present a significant shape corresponding to a predefined shape criterion of said gaseous species in said mixture, and
subsequently comparing said pruned spectrum with the library of reference optical spectra, and determining the presence of gaseous species based on the comparing, wherein said detecting of said gaseous species is implemented in real-time.