	US 7,468,517 B2
	Single stage charged particle beam energy width reduction system for charged particle beam system
Jürgen Frosien, Riemerling (Germany); Ralf Degenhardt, Landsham (Germany); Stefan Lanio, Erding (Germany); and Gerald Schönecker, Munich (Germany)
Assigned to ICT Integrated Circuit Testing Gesellschaft fur Halbleiternruftechnik mbH, Heimstetten (Germany)
Appl. No. 10/571,345 PCT Filed Sep. 02, 2004, PCT No. PCT/EP2004/009796 § 371(c)(1), (2), (4) Date Sep. 28, 2006, PCT Pub. No. WO2005/024889, PCT Pub. Date Mar. 17, 2005.
Claims priority of application No. 03020710 (EP), filed on Sep. 11, 2003; and application No. 03028694 (EP), filed on Dec. 16, 2003.
Prior Publication US 2007/0158561 A1, Jul. 12, 2007
Int. Cl. G21K 1/08 (2006.01); H01J 37/21 (2006.01); H01J 37/20 (2006.01)

U.S. Cl. 250—396R [250/310; 250/396 ML]

27 Claims

1. Charged particle beam device with a z-axis along an optical axis, comprising:

a first lens generating a crossover, the crossover having a z-position z_c;

a second lens positioned after the crossover;

an element acting in a focusing and dispersive manner in an x-z plane, the center of the element acting in a focusing and dispersive manner having essentially the z-position z_c;

a multipole element, which acts in the x-z-plane and the y-z-plane, the center of the multipole element having essentially the z-position z_c;

a first charged particle selection element being positioned in beam direction before the element acting in a focusing and dispersive manner; and

a second charged particle selection element being positioned in beam direction behind the element acting in a focusing and dispersive manner, wherein the second charged particle selection element is velocity dependent selection element.