US 7,467,461 B2
Additive gap process to define trailing and side shield gap for a perpendicular write head
Christian Rene Bonhote, San Jose, Calif. (US); Quang Le, San Jose, Calif. (US); Neil Leslie Robertson, Palo Alto, Calif. (US); and Petrus Antonius Van Der Heijden, San Jose, Calif. (US)
Assigned to Hitachi Global Storage Technologies Netherlands B.V., Amsterdam (Netherlands)
Filed on Mar. 20, 2007, as Appl. No. 11/688,310.
Prior Publication US 2008/0244896 A1, Oct. 09, 2008
Int. Cl. G11B 5/127 (2006.01); H04R 31/00 (2006.01)
U.S. Cl. 29—603.16  [29/603.11; 29/603.13; 29/603.18; 29/605; 29/606; 360/121; 360/122; 360/317; 451/5; 451/41] 23 Claims
OG exemplary drawing
 
1. A method for manufacturing a magnetic write head for perpendicular magnetic recording, comprising:
providing a substrate;
depositing a magnetic write pole material over the substrate;
forming a mask structure over the magnetic write pool material, the mask structure including a hard mask layer comprising a material that is resistant to chemical mechanical polishing formed over the magnetic write pole material;
performing a first ion milling to define a write pole;
depositing a non-magnetic side gap layer;
performing a second ion milling sufficiently to remove a portion of the substrate material resulting in a lowered substrate floor;
depositing a sacrificial fill layer;
performing a chemical mechanical polishing process;
removing the sacrificial fill layer; and
depositing a magnetic material to from a wrap around trailing shield.