| US 7,467,072 B2 | ||
| Simulation of objects in imaging using edge domain decomposition | ||
| Kostantinos Adam, 351 Torino Dr., #3, San Carlos, Calif. 94070 (US) | ||
| Filed on Mar. 16, 2007, as Appl. No. 11/724,901. | ||
| Application 11/724901 is a continuation of application No. 10/677136, filed on Sep. 30, 2003, granted, now 7,266,480. | ||
| Claims priority of provisional application 60/415510, filed on Oct. 01, 2002. | ||
| Prior Publication US 2007/0213962 A1, Sep. 13, 2007 | ||
| Int. Cl. G06F 17/50 (2006.01); G03F 7/00 (2006.01) | ||
| U.S. Cl. 703—2 [703/6; 716/19; 430/5] | 27 Claims |
| 1. A method of simulating scattering of a photomask when illuminated in an imaging process, wherein the photomask comprises
a layout pattern having objects including edges, the method comprising:
defining at least one set comprising an edge or combinations of the edges;
associating an electromagnetic field characteristic for each set; and
outputting each of the associated electromagnetic field characteristics in association with a corresponding set, and subsequently
simulating the transmission of a portion of the photomask using at least one of the simulated electromagnetic field characteristics.
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