US 7,466,426 B2
Phase shifting imaging module and method of imaging
Shu-Guo Tang, Blue Bell, Pa. (US); Kevin George Harding, Niskayuna, N.Y. (US); Robert William Tait, Brighton, Mich. (US); and Craig Alan Cantello, Schenectady, N.Y. (US)
Assigned to General Electric Company, Niskayuna, N.Y. (US)
Filed on Dec. 14, 2005, as Appl. No. 11/300,553.
Prior Publication US 2007/0133009 A1, Jun. 14, 2007
Int. Cl. G01B 9/02 (2006.01); G01B 11/02 (2006.01)
U.S. Cl. 356—495  [356/512] 17 Claims
OG exemplary drawing
 
1. A phase shifting imaging module comprising:
a first beam splitter configured to split an image radiation beam into first and second image radiation beams;
a first prism configured to align the first and second image radiation beams;
a second beam splitter configured to split the first and second image radiation beams into four image radiation beams;
a second prism configured to align the four image radiation beams;
a phase mask that receives the four image radiation beams and is configured to introduce a phase retardation between the four image radiation beams resulting in four phase shifted image radiation beams; and
a pixilated sensor configured to generate image data based upon each of the four phase shifted image radiation beams.