| US 7,466,121 B2 | ||
| MEMS based current sensor using magnetic-to-mechanical conversion and reference components | ||
| Ertugrul Berkcan, Clifton Park, N.Y. (US); Christopher James Kapusta, Duanesburg, N.Y. (US); Glenn Scott Claydon, Wynantskill, N.Y. (US); Anis Zribi, Rexford, N.Y. (US); Laura Jean Meyer, Schenectady, N.Y. (US); and Wei-Cheng Tian, Clifton Park, N.Y. (US) | ||
| Assigned to General Electric Company, Niskayuna, N.Y. (US) | ||
| Filed on Aug. 18, 2006, as Appl. No. 11/506,493. | ||
| Application 11/506493 is a division of application No. 10/863442, filed on Jun. 07, 2004, granted, now 7,112,951, filed on Sep. 26, 2006. | ||
| Prior Publication US 2007/0052410 A1, Mar. 08, 2007 | ||
| Int. Cl. G01R 33/00 (2006.01) | ||
| U.S. Cl. 324—126 [324/117 R] | 6 Claims |
| 1. A micro-electromechanical system (MEMS) current sensor, comprising:
a first conductor for measuring a current;
a first coil for receiving a first predetermined bias current coupled to said current;
a second coil for receiving a second predetermined bias current coupled to said current; and
a MEMS-based magnetic field sensing component having a magneto-MEMS component for sensing a shaped magnetic field and, in
response thereto, providing an indication of said current in said first conductor.
|