	US 7,465,915 B2
	Measuring method of incident light and sensor having spectroscopic mechanism employing it
Kazuaki Sawada, Toyohashi (Japan); Makoto Ishida, Toyohashi (Japan); Yuki Maruyama, Toyohashi (Japan); and Hideki Muto, Odawara (Japan)
Assigned to Japan Science and Technology Agency, Kawaguchi-shi (Japan)
Appl. No. 10/561,954 PCT Filed Mar. 25, 2004, PCT No. PCT/JP2004/004210 § 371(c)(1), (2), (4) Date May 17, 2006, PCT Pub. No. WO2004/113854, PCT Pub. Date Dec. 29, 2004.
Claims priority of application No. 2003-177425 (JP), filed on Jun. 23, 2003.
Prior Publication US 2006/0244089 A1, Nov. 02, 2006
Int. Cl. G01J 3/50 (2006.01); H01L 27/00 (2006.01); H01L 29/861 (2006.01)

U.S. Cl. 250—226 [250/208.1; 257/443; 257/458]

12 Claims

1. A spectroscopic sensor comprising:

(a) a semiconductor substrate;

(b) a first diffusion layer provided on the semiconductor substrate;

(c) a second diffusion layer for taking out electrons captured in the first diffusion layer to the outside, the second diffusion layer being provided at one end of the first diffusion layer;

(d) a first electrode that is connected to the second diffusion layer and that takes out the captured electrons to the outside;

(e) a second electrode that is connected to another end opposing to the second diffusion layer of the first diffusion layer and that establishes an electric potential of the first diffusion layer;

(f) an electrode film provided on the first diffusion layer with an insulating film provided therebetween, the electrode film transmitting incident light and being applied with a gate voltage; and

(g) means that measures wavelength and intensity of the incident light by determining a light intensity (Φ) at a depth x from the surface of the first diffusion layer on the basis that the light intensity is exponentially attenuated when light is incident on the first diffusion layer, determining the ratio of the intensity of the intensity of the incident light absorbed to a depth W from the surface of the first diffusion layer in which electrons are captured to the intensity of the incident light absorbed to the whole depth of the diffusion layer, and determining a current generated to the depth W.