US 7,462,800 B2
Method of shaping lithographically-produced probe elements
Bahadir Tunaboylu, Gilbert, Ariz. (US); and Edward L. Malantonio, Conshohocken, Pa. (US)
Assigned to SV Probe Pte Ltd., Singapore (Singapore)
Filed on Nov. 16, 2005, as Appl. No. 11/280,090.
Claims priority of provisional application 60/633017, filed on Dec. 03, 2004.
Prior Publication US 2006/0119376 A1, Jun. 08, 2006
Int. Cl. B23K 26/38 (2006.01); B23H 1/00 (2006.01)
U.S. Cl. 219—121.69  [219/69.17] 9 Claims
OG exemplary drawing
 
1. A method of processing probe elements configured for use in a probe card, the method comprising the steps of:
lithographically producing a plurality of probe elements, each of the probe elements having a tip portion;
mounting the plurality of probe elemrnts to a support plate; orienting the support plate at a particular angle with respect to a structure used to remove material to form a particular shape to the tip portion of the probe elements that is well adapted to penetrate a contaminant layer of a surface to be probed by the probe elements;
operating the structure in a first pass over the probe elements to form the particular shape to the tip portion of the probe elements;
orienting the support plate and the probe elements for a second pass with respect to the structure in order to form the particular shape to the tip portion of the probe elements; and
operating the structure in a second pass over the probe elements to form the particular shape to the tip portion of the probe elements.