US 7,462,518 B2
Silicone metalization
Mariam N. Maghribi, Livermore, Calif. (US); Peter Krulevitch, Pleasanton, Calif. (US); and Julie Hamilton, Tracy, Calif. (US)
Assigned to Lawrence Livermore National Security, LLC, Livermore, Calif. (US)
Filed on Oct. 24, 2006, as Appl. No. 11/586,271.
Application 11/586271 is a division of application No. 10/295096, filed on Nov. 14, 2002, granted, now 7,145,229.
Prior Publication US 2007/0037315 A1, Feb. 15, 2007
Int. Cl. H01L 21/44 (2006.01)
U.S. Cl. 438—149  [438/151; 438/166; 438/459; 438/778; 257/E21.122; 257/E21.567; 257/E21.649] 1 Claim
OG exemplary drawing
 
1. A method of providing metal features on silicone, comprising the steps of:
providing a silicone layer on a matrix, wherein said step of providing a metal layer on said silicone layer produces stretchable metal traces that are capable of withstanding strains of 7% with S.D. 1, and
providing a metal layer on said silicone layer.