US 7,462,011 B2
Substrate processing system, substrate processing method, sealed container storing apparatus, program for implementing the substrate processing method, and storage medium storing the program
Satoshi Yamazaki, Nirasaki (Japan); and Tsukasa Makino, Nirasaki (Japan)
Assigned to Tokyo Electron Limited, Tokyo (Japan)
Filed on Aug. 12, 2005, as Appl. No. 11/202,317.
Claims priority of provisional application 60/608368, filed on Sep. 10, 2004.
Claims priority of application No. 2004-235266 (JP), filed on Aug. 12, 2004; and application No. 2005-164536 (JP), filed on Jun. 03, 2005.
Prior Publication US 2006/0105473 A1, May 18, 2006
Int. Cl. H01L 21/68 (2006.01); H01L 21/677 (2006.01); B05C 3/02 (2006.01)
U.S. Cl. 414—754  [118/729; 118/500; 414/940; 414/757] 4 Claims
OG exemplary drawing
 
1. A substrate processing system comprising:
a substrate processing apparatus that subjects substrates to plasma processing in a cleaned atmosphere;
a substrate transferring in/out apparatus having a sealed station unit that is connected to said substrate processing apparatus and has a cleaned atmosphere therein, a mounting stage on which a sealed container housing substrates is mounted, a substrate removal/housing apparatus that carries out removal of substrates from the sealed container and housing of substrates into the sealed container, and a substrate transferring apparatus that transfers substrates between said mounting stage and said substrate processing apparatus via said sealed station unit; and
a sealed container storing apparatus having a first sealed container storage portion that stores a sealed container housing substrates that have not been subjected to the plasma processing, a second sealed container storage portion that stores a sealed container housing substrates that have been subjected to the plasma processing, and a sealed container moving apparatus that moves the sealed containers between said first sealed container storage portion and said mounting stage, and between said mounting stage and said second sealed container storage portion.