| US 7,461,558 B2 | ||
| Capacitive pressure sensor with sealed reference chamber | ||
| Kia Silverbrook, Balmain (Australia); and Samuel George Mallinson, Balmain (Australia) | ||
| Assigned to Silverbrook Research Pty Ltd, Balmain, New South Wales (Australia) | ||
| Filed on May 03, 2007, as Appl. No. 11/744,211. | ||
| Application 11/744211 is a continuation of application No. 11/499808, filed on Aug. 07, 2006, granted, now 7,222,538. | ||
| Application 11/499808 is a continuation of application No. 10/965718, filed on Oct. 18, 2004, granted, now 7,121,145. | ||
| Prior Publication US 2007/0283763 A1, Dec. 13, 2007 | ||
| This patent is subject to a terminal disclaimer. | ||
| Int. Cl. G01L 9/12 (2006.01) | ||
| U.S. Cl. 73—724 [73/718; 73/754; 361/283.1] | 7 Claims |
| 1. A capacitive pressure sensor comprising:
a substrate assembly having a conductive layer and a silicon substrate defining through-channels and a termination layer mounted
to the silicon substrate to terminate the channels in closed ends;
a conductive membrane mounted to the substrate assembly so that a reference chamber is defined by respective channels, the
conductive membrane and the substrate assembly; and
a cap arranged on the substrate assembly and defining one or more apertures so that a pressure sensing chamber is defined
between the cap and the conductive membrane, such that differential pressure between the reference chamber and the pressure
sensing chamber can cause deflection of the conductive membrane which, in turn, varies the capacitance between the conductive
membrane and the conductive layer.
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