| US 7,461,553 B2 | ||
| Self-calibrating oversampling electromechanical modulator and self-calibration method | ||
| Ernesto Lasalandra, S. Donato Milanese (Italy); Fabio Pasolini, S. Martino Siccomario (Italy); and Valeria Greco, Catanzaro (Italy) | ||
| Assigned to STMicroelectronics S.r.l., Agrate Brianza (Italy) | ||
| Filed on Dec. 05, 2006, as Appl. No. 11/567,159. | ||
| Application 11/567159 is a division of application No. 10/198720, filed on Jul. 16, 2002, granted, now 7,155,979. | ||
| Claims priority of application No. TO2001A0705 (IT), filed on Jul. 18, 2001. | ||
| Prior Publication US 2007/0107492 A1, May 17, 2007 | ||
| Int. Cl. G01P 15/00 (2006.01) | ||
| U.S. Cl. 73—514.18 [73/1.38; 73/514.32; 73/514.19; 73/1.37; 73/514.17; 324/661; 324/662; 324/684; 324/686] | 15 Claims |
| 1. A method for calibrating an oversampling electromechanical modulator which includes a micro-electromechanical sensor having
a stator body and a mobile mass, between which there are a first sensing capacitance and a second sensing capacitance; the
method comprising the steps of:
supplying a first analog quantity correlated to a difference between said first sensing capacitance and said second sensing
capacitance;
generating a first numeric signal correlated to said analog quantity;
converting said first numeric signal to an output signal;
providing the output signal at an output of the electromechanical modulator;
connecting, to said micro-electromechanical sensor;
modifying said programmable calibration capacitance to eliminate a steady-state component of said numeric signal.
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