CPC H10N 30/50 (2023.02) [H10N 30/03 (2023.02); H10N 30/09 (2023.02); H10N 30/306 (2023.02)] | 20 Claims |
1. A transducer, comprising:
a supporting body including:
a first structural region having a first sidewall; and
a second structural region including a second sidewall spaced outward from the first sidewall;
a suspended structure, mechanically coupled to the supporting body, having a first and a second surface opposite to one another along an axis transverse to the first and second surfaces;
a recess defined by the first structural region, the second sidewall of the second structural region, and the second surface of the suspended structure;
a first piezoelectric transducer on the first surface of the suspended structure; and
a second piezoelectric transducer on the second surface of the suspended structure, the second piezoelectric transducer is at least partially within the recess.
|