US 11,835,146 B2
Symmetric flow valve for flow conductance control
Andrew Nguyen, San Jose, CA (US); Yogananda Sarode Vishwanath, Bangalore (IN); Xue Chang, San Jose, CA (US); Anilkumar Rayaroth, San Jose, CA (US); Chetan Naik, Bangalore (IN); and Balachandra Jatak Narayan, Bangalore (IN)
Assigned to APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Dec. 1, 2021, as Appl. No. 17/539,372.
Application 17/539,372 is a continuation of application No. 16/542,798, filed on Aug. 16, 2019, granted, now 11,199,267.
Prior Publication US 2022/0090686 A1, Mar. 24, 2022
Int. Cl. F16K 11/22 (2006.01); F16K 1/42 (2006.01); F16K 1/36 (2006.01); F16K 51/02 (2006.01)
CPC F16K 1/42 (2013.01) [F16K 1/36 (2013.01); F16K 11/22 (2013.01); F16K 51/02 (2013.01); Y10T 137/87877 (2015.04)] 19 Claims
OG exemplary drawing
 
1. A symmetric flow valve for use in a substrate processing chamber, comprising:
a valve body having sidewalls, a bottom plate, and a top plate that together define an interior volume, wherein the valve body includes a plurality of axisymmetrically disposed openings comprising three or more openings arranged in a non-linear manner, wherein a first opening of the plurality of axisymmetrically disposed openings is configured to interface with a pump port, wherein the top plate includes an opening, and wherein all of the plurality of axisymmetrically disposed openings are disposed radially inward of an outer diameter of the opening of the top plate;
a first poppet coupled to a first actuator to move the first poppet between at least a closed position and an open position to selectively seal the first opening; and
a second poppet coupled to a second actuator to move the second poppet between at least a closed position and an open position to selectively seal a second opening of the plurality of axisymmetrically disposed openings.