US 7,459,833 B2
Thin film piezoelectric actuator
Takashi Kawakubo, Kanagawa-ken (Japan); Ryoichi Ohara, Kanagawa-ken (Japan); Tomio Ono, Kanagawa-ken (Japan); Toshihiko Nagano, Kanagawa-ken (Japan); Michihiko Nishigaki, Kanagawa-ken (Japan); Takaaki Yasumoto, Kanagawa-ken (Japan); Kazuhide Abe, Kanagawa-ken (Japan); and Kenya Sano, Kanagawa-ken (Japan)
Assigned to Kabushiki Kaisha Toshiba, Tokyo (Japan)
Filed on Feb. 10, 2005, as Appl. No. 11/54,404.
Claims priority of application No. 2004-034984 (JP), filed on Feb. 12, 2004; and application No. 2005-003370 (JP), filed on Jan. 11, 2005.
Prior Publication US 2005/0194867 A1, Sep. 08, 2005
Int. Cl. H01L 41/08 (2006.01)
U.S. Cl. 310—328 17 Claims
OG exemplary drawing
 
1. A thin film piezoelectric actuator comprising a driving part at least one end of which is supported by an anchor portion, the driving part including:
a piezoelectric film;
a first lower electrode provided under a first region of the piezoeleciric film;
a second lower electrode provided under a second region different from the first region of the piezoelectric film;
a first upper electrode provided opposite to the first lower electrode on the piezoelectric film;
a second upper electrode provided opposite to the second lower electrode on the piezoelectric film;
a first connection part that electrically connects the first lower electrode and the second upper electrode via a first via hole formed in the piezoelectric film; and
a second connection part that electrically connects the second lower electrode and the first upper electrode via a second via hole formed in the piezoelectric film.