| US 7,459,829 B2 | ||
| Surface acoustic wave device and method of manufacturing the same, IC card, and mobile electronic apparatus | ||
| Shinya Aoki, Minowa (Japan); and Yoshio Maeda, Fujimi (Japan) | ||
| Assigned to Seiko Epson Corporation, (Japan) | ||
| Filed on Dec. 16, 2005, as Appl. No. 11/305,445. | ||
| Claims priority of application No. 2004-366879 (JP), filed on Dec. 17, 2004; and application No. 2005-288046 (JP), filed on Sep. 30, 2005. | ||
| Prior Publication US 2006/0131998 A1, Jun. 22, 2006 | ||
| Int. Cl. H01L 41/04 (2006.01); H03H 9/145 (2006.01) | ||
| U.S. Cl. 310—313B [310/313 R; 333/189; 333/193; 333/195] | 16 Claims |

| 1. A surface acoustic wave device comprising:
a surface acoustic wave (SAW) chip having:
IDT electrodes disposed on a main surface of a piezoelectric substrate;
extraction electrodes extracted from the IDT electrodes; and
a metal bonding portion disposed along an entire periphery of the main surface of the piezoelectric substrate; and
a cover having:
through-holes in an insulating substrate at positions corresponding to the extraction electrodes of the SAW chip;
a metal bonding portion disposed along an entire periphery of a lower surface of the insulating substrate;
connection electrodes disposed on the lower surface of the insulating substrate along circumferences of openings of the through-holes;
and
external electrodes disposed on an upper surface of the insulating substrate in peripheries of openings of the through-holes;
concave portions disposed at positions at least partially overlapping with the external electrodes on the upper surface of
the cover;
wherein the SAW chip and the cover are bonded in a body by bonding the metal bonding portion of the SAW chip and the metal
bonding portion of the cover and bonding the extraction electrodes of the SAW chip and the connection electrodes of the cover
so as to hermetically seal the IDT electrodes within a space defined between the SAW chip and the cover, and
wherein the IDT electrodes and the external electrodes are electrically connected to each other through a conductive material
in the through-holes that is independent from the connection electrodes and the external electrodes.
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