| US 7,459,827 B2 | ||
| Piezoelectric-driven MEMS device and method for manufacturing the same | ||
| Takashi Kawakubo, Kanagawa-Ken (Japan); Toshihiko Nagano, Kanagawa-Ken (Japan); Kazuhide Abe, Kanagawa-Ken (Japan); and Michihiko Nishigaki, Kanagawa-Ken (Japan) | ||
| Assigned to Kabushiki Kaisha Toshiba, Tokyo (Japan) | ||
| Filed on Apr. 27, 2005, as Appl. No. 11/115,107. | ||
| Claims priority of application No. 2004-133736 (JP), filed on Apr. 28, 2004. | ||
| Prior Publication US 2005/0242687 A1, Nov. 03, 2005 | ||
| Int. Cl. H01L 41/08 (2006.01) | ||
| U.S. Cl. 310—309 | 16 Claims |
| 1. A piezoelectric-driven MEMS device, the device comprising:
a movable flat beam having a piezoelectric film disposed above a substrate with a recessed portion such that the piezoelectric
film is bridged over the recessed portion, piezoelectric drive mechanisms disposed on both ends of the piezoelectric film
and configured to drive the piezoelectric film, and a first electrode disposed at the center of the substrate-side of the
piezoelectric film, the recessed portion having the shape of a cross; and
a second electrode disposed on a flat part of the recessed portion of the substrate and facing the first electrode of the
movable flat beam.
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