US 7,459,717 B2
Phase change memory cell and manufacturing method
Hsiang Lan Lung, Elmsford, N.Y. (US)
Assigned to Macronix International Co., Ltd., Hsinchu (Taiwan)
Filed on Jun. 14, 2006, as Appl. No. 11/424,177.
Claims priority of provisional application 60/740176, filed on Nov. 28, 2005.
Prior Publication US 2007/0121363 A1, May 31, 2007
Int. Cl. H01L 47/00 (2006.01)
U.S. Cl. 257—4  [257/2; 257/5; 257/379; 257/529; 257/537; 365/148; 365/163] 15 Claims
OG exemplary drawing
 
1. A phase change memory cell, the memory cell being a part of a phase change memory device, comprising:
first and second electrodes having generally coplanar surfaces spaced apart by a gap;
a phase change bridge electrically coupling the first and second electrodes;
at least a section of the phase change bridge comprising a higher transition temperature bridge portion and a lower transition temperature portion; and
the lower transition temperature portion comprising a phase change region which can be transitioned, by the passage of electrical current therethrough, from generally crystalline to generally amorphous states at a lower temperature than the higher transition temperature portion.