| US 7,456,975 B2 | ||
| Methods and systems for interferometric analysis of surfaces and related applications | ||
| Peter J. De Groot, Middletown, Conn. (US) | ||
| Assigned to Zygo Corporation, Middlefield, Conn. (US) | ||
| Filed on Nov. 19, 2007, as Appl. No. 11/942,166. | ||
| Application 11/942166 is a continuation of application No. 10/941649, filed on Sep. 15, 2004, granted, now 7,298,494. | ||
| Claims priority of provisional application 60/502932, filed on Sep. 15, 2003. | ||
| Claims priority of provisional application 60/502933, filed on Sep. 15, 2003. | ||
| Claims priority of provisional application 60/502907, filed on Sep. 15, 2003. | ||
| Claims priority of provisional application 60/502930, filed on Sep. 15, 2003. | ||
| Claims priority of provisional application 60/539437, filed on Jan. 26, 2004. | ||
| Prior Publication US 2008/0068614 A1, Mar. 20, 2008 | ||
| This patent is subject to a terminal disclaimer. | ||
| Int. Cl. G01B 11/02 (2006.01) | ||
| U.S. Cl. 356—497 [356/511] | 25 Claims |
| 1. A method comprising:
providing an interference signal produced by an interferometer for each of multiple spatial locations of a test object comprising
a thin film having a thickness of 1000 nm or less; and
determining a surface topography for the object in the presence of the thin film based on the interference signals and a template
indicative of a response of the interferometer.
|