US 7,456,630 B2
NMR characterization of thin films
Rex E. Gerald, II, Brookfield, Ill. (US); Robert J. Klingler, Glenview, Ill. (US); Jerome W. Rathke, Homer Glen, Ill. (US); Rocio Diaz, Chicago, Ill. (US); and Lela Vukovic, Westchester, Ill. (US)
Assigned to U Chicago Argonne LLC, Chicago, Ill. (US)
Filed on Jul. 11, 2006, as Appl. No. 11/484,348.
Claims priority of provisional application 60/719479, filed on Sep. 22, 2005.
Prior Publication US 2007/0063702 A1, Mar. 22, 2007
Int. Cl. G01V 3/00 (2006.01)
U.S. Cl. 324—307 17 Claims
OG exemplary drawing
 
1. A method of characterizing thin films, comprising the steps of:
providing a starting material;
applying gravitational forces to at least the starting material;
heating and/or cooling the starting material to form a processed material;
forming a thin film of material inside a chamber from said processed material;
heating and/or cooling the thin film;
sensing a nuclear magnetic resonance signal from the thin film of material; and
analyzing the nuclear magnetic resonance signal to evaluate characteristics of the thin film of material.