| US 7,456,548 B2 | ||
| Piezoelectric element, piezoelectric actuator, and ink jet recording head | ||
| Makoto Kubota, Tokyo (Japan); Motokazu Kobayashi, Yokohama (Japan); Keiko Abe, Kawasaki (Japan); Fumio Uchida, Daito (Japan); Kenji Maeda, Nakatsugawa (Japan); and Chiemi Shimizu, Hirakata (Japan) | ||
| Assigned to Canon Kabushiki Kaisha, Tokyo (Japan); and Fuji Chemical Co, Ltd., Osaka (Japan) | ||
| Filed on Apr. 30, 2007, as Appl. No. 11/741,895. | ||
| Claims priority of application No. 2006-130295 (JP), filed on May 09, 2006. | ||
| Prior Publication US 2007/0262678 A1, Nov. 15, 2007 | ||
| Int. Cl. H01L 41/08 (2006.01) | ||
| U.S. Cl. 310—324 [310/328; 310/358] | 10 Claims |
| 1. A piezoelectric element having a piezoelectric film and one pair of electrodes being in contact with
the piezoelectric film on a substrate, wherein
the piezoelectric film has a structure in which a lead-containing piezoelectric film and a lead-free piezoelectric film are
layered, and
in the piezoelectric film, a layer furthest from the substrate and a layer closest to the substrate are lead-free piezoelectric
films.
|