US 7,456,057 B2
Germanium on glass and glass-ceramic structures
Kishor Purushottam Gadkaree, Big Flats, N.Y. (US); Paul Stephen Danielson, Corning, N.Y. (US); Matthew John Dejneka, Corning, N.Y. (US); Josef Chauncey Lapp, Corning, N.Y. (US); and Linda Ruth Pinckney, Corning, N.Y. (US)
Assigned to Corning Incorporated, Corning, N.Y. (US)
Filed on May 01, 2006, as Appl. No. 11/415,732.
Claims priority of provisional application 60/755934, filed on Dec. 31, 2005.
Prior Publication US 2007/0166947 A1, Jul. 19, 2007
Int. Cl. H01L 21/338 (2006.01)
U.S. Cl. 438—179  [438/178] 20 Claims
OG exemplary drawing
 
1. A semiconductor-on-insulator structure comprising first and second layers which are attached to one another either directly or through one or more intermediate layers, wherein the first layer comprises a substantially single crystal semiconductor material comprising germanium; the second layer comprises a glass or a glass-ceramic having a linear coefficient thermal of expansion (25-300° C.) which is about 61×10−7/° C. and within the range of +/−20×10−7/° C. of the linear coefficient thermal of expansion of the germanium first layer.