| US 7,456,029 B2 | ||
| Planar flux concentrator for MRAM devices | ||
| Yimin Guo, San Jose, Calif. (US); and Po-Kang Wang, San Jose, Calif. (US) | ||
| Assigned to MagIC Technologies, Inc., Milpitas, Calif. (US) | ||
| Filed on Jun. 28, 2006, as Appl. No. 11/476,495. | ||
| Prior Publication US 2008/0001207 A1, Jan. 03, 2008 | ||
| Int. Cl. H01L 21/00 (2006.01) | ||
| U.S. Cl. 438—3 [438/264; 438/239] | 10 Claims |

| 1. A low cost process to manufacture a flux concentrator, comprising:
providing an MTJ stack, including a capping layer having a top surface, a bottom electrode, and a dielectric layer, having
a top surface, that encapsulates said MTJ stack and extends above said capping layer;
etching in said dielectric layer a trench, having vertical sidewalls, that is longer and wider than said capping layer and
that extends downwards as far as said capping layer top surface;
then just filling said trench with a conductive material, thereby forming a bit line that passes over said MTJ stack and that
has a top surface coplanar with said dielectric top surface;
then depositing an insulating layer on said coplanar surfaces;
depositing on said insulating layer a ferromagnetic layer;
depositing an antiferromagnetic layer on said ferromagnetic layer, thereby forming a concentrator for magnetic flux that results
from the passage of current through said bit line; and
annealing said ferromagnetic and antiferromagnetic layers in the presence of a magnetic field whose direction is parallel
to that of said bit line thereby providing a domain stabilizing field for said ferromagnetic layer.
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