US 7,456,029 B2
Planar flux concentrator for MRAM devices
Yimin Guo, San Jose, Calif. (US); and Po-Kang Wang, San Jose, Calif. (US)
Assigned to MagIC Technologies, Inc., Milpitas, Calif. (US)
Filed on Jun. 28, 2006, as Appl. No. 11/476,495.
Prior Publication US 2008/0001207 A1, Jan. 03, 2008
Int. Cl. H01L 21/00 (2006.01)
U.S. Cl. 438—3  [438/264; 438/239] 10 Claims
OG exemplary drawing
 
1. A low cost process to manufacture a flux concentrator, comprising:
providing an MTJ stack, including a capping layer having a top surface, a bottom electrode, and a dielectric layer, having a top surface, that encapsulates said MTJ stack and extends above said capping layer;
etching in said dielectric layer a trench, having vertical sidewalls, that is longer and wider than said capping layer and that extends downwards as far as said capping layer top surface;
then just filling said trench with a conductive material, thereby forming a bit line that passes over said MTJ stack and that has a top surface coplanar with said dielectric top surface;
then depositing an insulating layer on said coplanar surfaces;
depositing on said insulating layer a ferromagnetic layer;
depositing an antiferromagnetic layer on said ferromagnetic layer, thereby forming a concentrator for magnetic flux that results from the passage of current through said bit line; and
annealing said ferromagnetic and antiferromagnetic layers in the presence of a magnetic field whose direction is parallel to that of said bit line thereby providing a domain stabilizing field for said ferromagnetic layer.