	US 7,455,719 B2
	Gas storage and dispensing system with monolithic carbon adsorbent
J. Donald Carruthers, Fairfield, Conn. (US)
Assigned to Advanced Technology Materials, Inc., Danbury, Conn. (US)
Filed on Sep. 06, 2005, as Appl. No. 11/220,166.
Application 11/220166 is a continuation of application No. 10/767901, filed on Jan. 29, 2004, granted, now 6,939,394, filed on Sep. 06, 2005.
Application 10/767901 is a continuation of application No. 10/315635, filed on Dec. 10, 2002, granted, now 6,743,278, filed on Jun. 01, 2004.
Prior Publication US 2006/0011064 A1, Jan. 19, 2006
This patent is subject to a terminal disclaimer.
Int. Cl. B01D 53/04 (2006.01)

U.S. Cl. 95—90 [95/131; 96/108]

66 Claims

1. A fluid storage and dispensing vessel comprising an interior volume having disposed therein an adsorbent that is characterized by at least one of the following characteristics:

(a) a fill density measured for arsine gas at 25° C. and pressure of 650 torr that is greater than 400 grams arsine per liter of adsorbent;

(b) at least 30% of overall porosity of said adsorbent comprising slit-shaped pores having a size in a range of from about 0.3 to about 0.72 nanometer, and at least 20% of the overall porosity comprising micropores of diameter <2 nanometers; and

wherein said adsorbent is contained in said interior volume for sorptively retaining a fluid thereon and from which the fluid is desorbable for dispensing from the vessel, and further comprising said fluid contained therein, wherein the fluid comprises a fluid selected from the group consisting of hydrides, halides and organometallic gaseous reagents.