US 7,453,228 B2
Method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device
Marcel François Heertjes, Best (Netherlands); Yin Tim Tso, Eindhoven (Netherlands); Ramidin Izair Kamidi, Eindhoven (Netherlands); and Dennis Andreas Petrus Hubertina Houben, Maastricht (Netherlands)
Assigned to ASML Netherlands B.V., Veldhoven (Netherlands); and Koninklijke Philips Electronics, Eindhoven (Netherlands)
Filed on Apr. 07, 2006, as Appl. No. 11/399,589.
Prior Publication US 2007/0236163 A1, Oct. 11, 2007
Int. Cl. G05B 5/01 (2006.01)
U.S. Cl. 318—619  [318/135; 318/560; 318/609; 318/632] 16 Claims
OG exemplary drawing
 
1. A method for controlling a positioning device, the positioning device comprising a stator and mover, the mover being movable relative to the stator; a position sensor configured to generate a position signal indicative of a position of the mover relative to the stator; a controller configured to receive the position signal, compare it to a setpoint signal to obtain an error signal, and generate a mover control signal on the basis of a signal component of the position signal, the controller having a variable gain; the positioning device, including the position sensor and the controller are arranged in a control loop, the method comprising:
selectively setting the gain, for error signals having a magnitude in a predefined range, to a value higher than a value for error signals having a magnitude outside the range.