| US 7,452,655 B2 | ||
| Acrylic copolymer and radiation-sensitive resin composition | ||
| Hiroyuki Ishii, Tokyo (Japan); Kouichi Fujiwara, Tokyo (Japan); Hiroshi Yamaguchi, Tokyo (Japan); and Yukio Nishimura, Tokyo (Japan) | ||
| Assigned to JSR Corporation, Tokyo (Japan) | ||
| Appl. No. 10/533,254 PCT Filed Nov. 04, 2003, PCT No. PCT/JP03/14051 § 371(c)(1), (2), (4) Date Oct. 25, 2005, PCT Pub. No. WO2004/041879, PCT Pub. Date May 21, 2004. |
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| Claims priority of application No. 2002-320697 (JP), filed on Nov. 05, 2002; and application No. 2002-330870 (JP), filed on Nov. 14, 2002. | ||
| Prior Publication US 2006/0074139 A1, Apr. 06, 2006 | ||
| Int. Cl. G03F 7/00 (2006.01); G03F 7/004 (2006.01) | ||
| U.S. Cl. 430—270.1 [526/282] | 12 Claims |
| 1. An acrylic copolymer comprising:
a recurring unit of the following formula (1),
 a recurring unit of the following formula (2),
 wherein R represents a hydrogen atom or a methyl group; R1 individually represents a hydrogen atom, hydroxyl group, or —COOR3 group, wherein R3 is a hydrogen atom, a linear or branched alkyl group having 1-4 carbon atoms or an alicyclic alkyl group having 3-20 carbon
atoms, provided that at least one of R1 groups is not a hydrogen atom, and
a recurring unit of the following formula (3),
 wherein any two of R2 groups form, in combination and together with the carbon atom to which the two R2 groups bond, a divalent alicyclic hydrocarbon group having 4-20 carbon atoms or a derivative thereof, with the remaining R2 being a linear or branched alkyl group having 1-4 carbon atoms, a monovalent alicyclic hydrocarbon group having 4-20 carbon
atoms, or a derivative thereof.
|