US 11,818,957 B2
Piezoelectrically actuated MEMS optical device having a protected chamber and manufacturing process thereof
Domenico Giusti, Caponago (IT); and Irene Martini, Bergamo (IT)
Assigned to STMICROELECTRONICS S.r.l., Agrate Brianza (IT)
Filed by STMICROELECTRONICS S.r.l., Agrate Brianza (IT)
Filed on Jan. 17, 2020, as Appl. No. 16/746,676.
Claims priority of application No. 102019000000885 (IT), filed on Jan. 21, 2019.
Prior Publication US 2020/0235280 A1, Jul. 23, 2020
Int. Cl. H01L 41/09 (2006.01); H10N 30/20 (2023.01)
CPC H10N 30/2047 (2023.02) [B81B 2201/032 (2013.01); B81B 2203/0127 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A MEMS optical device, comprising:
a substrate, the substrate housing a first cavity containing a fluid;
a deformable structure coupled to the substrate, the deformable structure includes:
a first portion and a second portion, the first portion of the deformable structure being suspended over the first cavity;
a first flexible layer covering the first cavity and including a first region and a second region, the first region being arranged adjacent to the first cavity, and the first region of the first flexible layer forms a first membrane; and
a second flexible layer over the second region of the first flexible layer, and the second region of the first flexible layer and the second flexible layer form a second membrane;
a piezoelectric actuator over the second portion of the deformable structure, the second region of the flexible layer being arranged adjacent to the piezoelectric actuator; and
a cap coupled to the second portion of the deformable structure and defining a chamber housing the piezoelectric actuator, and
wherein the substrate further includes a second cavity, the second cavity being arranged adjacent to the second region of the first flexible layer, and wherein the first membrane is suspended over the first cavity, and the second membrane is suspended over the second cavity.