US 11,818,954 B2
Method of manufacturing piezoelectric actuator, piezoelectric actuator, and robot
Noboru Furuya, Chino (JP)
Assigned to SEIKO EPSON CORPORATION, Tokyo (JP)
Filed by SEIKO EPSON CORPORATION, Tokyo (JP)
Filed on Sep. 22, 2021, as Appl. No. 17/481,332.
Claims priority of application No. 2020-158306 (JP), filed on Sep. 23, 2020.
Prior Publication US 2022/0093846 A1, Mar. 24, 2022
Int. Cl. H10N 30/082 (2023.01); H01L 21/66 (2006.01); H10N 30/078 (2023.01); H10N 30/87 (2023.01)
CPC H10N 30/082 (2023.02) [H01L 22/12 (2013.01); H10N 30/078 (2023.02); H10N 30/871 (2023.02)] 8 Claims
OG exemplary drawing
 
1. A method of manufacturing a piezoelectric actuator, comprising:
preparing a laminate including a substrate, a first electrode layer disposed on the substrate, a piezoelectric layer disposed on the first electrode layer, and a second electrode layer disposed on the piezoelectric layer; and
forming a contour shape of the piezoelectric layer, wherein
forming of the contour shape comprising:
dry etching the piezoelectric layer from the second electrode layer side towards the first electrode layer side by dry etching the piezoelectric layer in the thickness direction,
wherein in the dry etching, the piezoelectric layer is dry etched to a thickness between 80% and 95% of the thickness of the piezoelectric layer,
covering, with a resist film, a dry etched surface formed on a side surface of the piezoelectric layer by the dry etching, and
wet etching the piezoelectric layer from the second electrode layer side to wet etch the piezoelectric layer until the first electrode layer is reached.