US 11,818,849 B1
Increasing adhesion of metal-organic interfaces by silane vapor treatment
Kenneth Sautter, Fremont, CA (US); Syndee Young, San Jose, CA (US); and Charudatta Galande, Fremont, CA (US)
Assigned to YIELD ENGINEERING SYSTEMS, INC., Fremont, CA (US)
Filed by Yield Engineering Systems, Inc., Fremont, CA (US)
Filed on Apr. 21, 2023, as Appl. No. 18/137,876.
Int. Cl. H05K 3/38 (2006.01); H05K 3/42 (2006.01); H05K 3/14 (2006.01)
CPC H05K 3/389 (2013.01) [H05K 3/146 (2013.01); H05K 3/382 (2013.01); H05K 3/386 (2013.01); H05K 3/42 (2013.01); Y10T 29/49155 (2015.01)] 20 Claims
OG exemplary drawing
 
1. A method of improving the adhesion of a metal-organic interface in an electronic device, comprising:
providing a substrate with a metal structure formed thereon;
treating a surface of the metal structure with a vapor of a silane composition to deposit a silane mono-layer on the metal structure, wherein the silane composition includes at least one of
(i.)N-(2-Aminoethyl)-3-aminopropyltrimethoxysilane (AE-APTMS),
(ii.) N,N′-Bis[(3-trimethoxysilyl)propyl]ethylenediamine (TMSP-ED),
(iii.) Bis(3-Trimethoxysilylpropyl)amine, (TMSPA),
(iv.) 3-Mercaptopropyltrimethoxysilane (MPTMS),
(v.)N-(2-Aminoethyl)-3-aminopropylsilanetriol, 25% in water (AE-APST),
(vi.) 3-Thiocyanatopropyltriethoxysilane, 92% (TCPTES),
(vii.)N-(6-Aminohexyl)aminomethyl trimethoxysilane,
(viii.) 1,3-Bis(3-aminopropyl)tetramethyldisiloxane,
(ix.) Bis[3-(triethoxysilyl)propyl]disulfide, 90% (TESPDS),
(x.) Cysteamine,
(xi.) 3-Aminopropanethiol,
(xii.) Aminoethylaminopropyl/methylsilsesquioxane, in aqueous solution,
(xiii.) Aminopropylsilsesquioxane in aqueoussolution (APS),
(xiv.) (2-Diethylphosphatoethyltriethoxysilane),
(xv.) (2-Diethylphosphatoethyl)methyldiethoxysilane,
(xvi.)N-(2-Aminoethyl)-3-Aminopropyltriethoxysilane,
(xvii.) (3-(M-AMINOPHENOXY) PROPYLTRIMETHOXYSILANE,
(xviii.)N-(2-Aminoethyl)-3-Aminopropylmethyldimethoxysilane,
(xix.)N-(2-Aminoethyl)-3-Aminoisobutylmethyldimethoxysilane,
(xx.)N-(2-Aminoethyl)-3-Aminoisobutyldimethylmethoxysilane,
(xxi.) 4-Aminobutyltriethoxysilane,
(xxii.) (Aminoethylaminomethyl)Phenethyltrimethoxysilane,
(xxiii.)N-(2-Aminoethyl)-3-Aminopropylmethyldiethoxysilane,
(xxiv.)N-(2-Aminoethyl)-11-Aminoundecyltrimethoxysilane,
(xxv.)N-(6-Aminohexyl)Aminopropyltrimethoxysilane,
(xxvi.)N-(6-Aminohexyl)Aminopropyltrimethoxysilane,
(xxvii.) m-AMINOPHENYLTRIMETHOXYSILANE, or
(xxviii.) m-AMINOPHENYLTRIMETHOXYSILANE; and
after treating the surface of the metal structure, coating the treated surface with an organic material, wherein the metal-organic interface between the treated surface of the metal structure and the coated organic layer has improved adhesion.