US 11,818,830 B2
RF quadrupole particle accelerator
Frank Sinclair, Boston, MA (US); Wai-Ming Tam, Manchester-by-the-Sea, MA (US); Costel Biloiu, Rockport, MA (US); and William Davis Lee, Rockport, ME (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jan. 29, 2021, as Appl. No. 17/163,251.
Prior Publication US 2022/0248523 A1, Aug. 4, 2022
Int. Cl. H05H 9/04 (2006.01); H01J 37/317 (2006.01); H05H 7/22 (2006.01); H05H 7/02 (2006.01)
CPC H05H 9/04 (2013.01) [H01J 37/3171 (2013.01); H05H 7/02 (2013.01); H05H 7/22 (2013.01); H01J 2237/04732 (2013.01); H05H 2007/222 (2013.01); H05H 2007/227 (2013.01)] 16 Claims
OG exemplary drawing
 
1. An apparatus, comprising:
a drift tube assembly, the drift tube assembly comprising a plurality of drift tubes that define a triple gap configuration, and are arranged to accelerate and transmit an ion beam along a beam path;
a resonator, to output an RF signal to the drift tube assembly; and
an RF quadrupole triplet, connected to the drift tube assembly, and arranged circumferentially around the beam path, the RF quadrupole triplet comprising:
a first quadrupole formed on a downstream portion of a first grounded drift tube and an upstream portion of a first powered drift tube;
a second quadrupole formed on a downstream portion of the first powered drift tube and an upstream portion of a second powered drift tube; and
a third quadrupole formed on a downstream portion of the second powered drift tube and an upstream portion of a second grounded drift tube,
wherein a downstream surface of the first grounded drift tube forms a complementary match to an upstream surface of the first powered drift tube, wherein a downstream surface of the first powered drift tube forms a complementary match to an upstream surface of the second powered drift tube, and wherein a downstream surface of the second powered drift tube forms a complementary match to an upstream surface of the second grounded drift tube.