US 11,818,810 B2
Heater assembly with purge gap control and temperature uniformity for batch processing chambers
Dhritiman Subha Kashyap, Bangalore (IN); Amit Rajendra Sherekar, Bangalore (IN); Kartik Shah, Saratoga, CA (US); Ashutosh Agarwal, San Jose, CA (US); Eric J. Hoffmann, San Francisco, CA (US); Sanjeev Baluja, Campbell, CA (US); and Vijay D. Parkhe, San Jose, CA (US)
Assigned to APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Mar. 26, 2021, as Appl. No. 17/214,340.
Prior Publication US 2022/0312553 A1, Sep. 29, 2022
Int. Cl. H05B 1/02 (2006.01); H01L 21/67 (2006.01)
CPC H05B 1/0233 (2013.01) [H01L 21/67103 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A heater assembly comprising:
a heater comprising a top surface, a bottom surface and a heater wall extending from the top surface to the bottom surface defining a thickness;
a top plate having a top surface, a bottom surface defining a top thickness of the top plate, the top plate having at least one opening through the thickness to allow the heater to pass through the opening, the opening having a peripheral inner surface defining a top plate wall extending the thickness of the top plate, the top plate wall comprising an upper portion and a bottom portion, the bottom portion forming an angle Θ relative to the upper portion;
a shield plate having a top surface, a bottom surface and an outer peripheral edge, the shield plate having an opening extending from the top surface to the bottom surface in an inner portion, the bottom surface of the heater spaced a distance from the top surface of the shield plate, the shield plate having a top portion having a top surface in contact with the bottom surface of the top plate, the top portion of the shield plate has a total thickness TSP defined by the top surface of the top portion of the shield plate to the bottom surface of the shield plate, the top portion having a plurality of holes extending through the top portion to the outer peripheral edge, the top portion having a ring-shaped groove positioned a distance below the top surface of the top portion on the outer peripheral edge of the shield plate; and
a split ring positioned within the ring-shaped groove of the shield plate.