US 11,818,540 B1
Acoustic devices with edge corrugation
You Qian, Singapore (SG); Rakesh Kumar, Singapore (SG); Guofeng Chen, Fremont, CA (US); Myeong Gweon Gu, Seoul (KR); Myung Hyun Park, Seongnam-si (KR); Jae Hyung Lee, Seoul (KR); and Michael Jon Wurtz, Lake Oswego, OR (US)
Assigned to Skyworks Global Pte. Ltd., Singapore (SG)
Filed by Skyworks Global Pte. Ltd., Singapore (SG)
Filed on Jan. 6, 2022, as Appl. No. 17/647,209.
Claims priority of provisional application 63/134,866, filed on Jan. 7, 2021.
Claims priority of provisional application 63/134,762, filed on Jan. 7, 2021.
Int. Cl. H04R 19/04 (2006.01); H04R 17/02 (2006.01); G10L 19/00 (2013.01); B81B 3/00 (2006.01)
CPC H04R 17/02 (2013.01) [B81B 3/0021 (2013.01); G10L 19/00 (2013.01); H04R 19/04 (2013.01); B81B 2201/0257 (2013.01); B81B 2203/019 (2013.01); B81B 2203/0118 (2013.01); B81B 2203/04 (2013.01); H04R 2201/003 (2013.01)] 21 Claims
OG exemplary drawing
 
1. A piezoelectric sensor for a piezoelectric microelectromechanical systems microphone, comprising:
a substrate;
a cantilever beam having a proximal portion attached to the substrate and a distal portion that extends from the proximal portion to a free end of the beam, the beam extending generally linearly from the proximal portion toward the free end in a first direction, the beam having a wall portion at or proximate the free end that extends in a second direction generally transverse to the first direction; and
an electrode disposed on or in the proximal portion of the beam.