CPC H04R 17/02 (2013.01) [B81B 3/0021 (2013.01); G10L 19/00 (2013.01); H04R 19/04 (2013.01); B81B 2201/0257 (2013.01); B81B 2203/019 (2013.01); B81B 2203/0118 (2013.01); B81B 2203/04 (2013.01); H04R 2201/003 (2013.01)] | 21 Claims |
1. A piezoelectric sensor for a piezoelectric microelectromechanical systems microphone, comprising:
a substrate;
a cantilever beam having a proximal portion attached to the substrate and a distal portion that extends from the proximal portion to a free end of the beam, the beam extending generally linearly from the proximal portion toward the free end in a first direction, the beam having a wall portion at or proximate the free end that extends in a second direction generally transverse to the first direction; and
an electrode disposed on or in the proximal portion of the beam.
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